Microtronic, maker of superior macro defect inspection programs and software program, has introduced a handy and extremely exact solution to monitor the weights of semiconductor wafers concurrently defects are being inspected – all on a single device. This patented functionality known as WaferWeight and it integrates totally into Microtronic’s EAGLEview™ line of high-speed macro defect inspection programs. It may be added to the newest EAGLEview 6 and likewise to earlier fashions of the device.
Picture Credit score: Microtronic
“Wafer mass metrology has change into more and more essential as semiconductor processes have change into extra advanced and delicate,” mentioned Microtronic CEO Reiner Fenske in making the announcement. “At present’s fabs would love to have the ability to measure the wafer mass adjustments that happen throughout processing, particularly in deposition, etch, plating, backgrinding, bonding, TSV, and comparable steps. Nevertheless, earlier wafer weight measurement strategies have been gradual and costly, requiring a separate device. Now, WaferWeight permits fabs to trace wafer mass shortly, precisely, and economically – concurrently with macro defect inspection. Our EAGLEview can do defect inspection and wafer weighing each on the similar time, on a single system.”
“And throughput velocity performs a vital function on this course of,” Fenske added. “With a view to monitor adjustments in wafer weight, fabs actually need to acquire information from each single wafer in each single lot. It’s the distinctive velocity of the EAGLEview that makes this doable. Which is why many top-tier fabs world wide have already chosen to include our WaferWeight functionality.”
The brand new WaferWeight measurements might have a decision as little as 0.1mg. This permits exact monitoring of adjustments in wafer mass between course of steps – and likewise between totally different wafers in rather a lot. Monitoring wafer weight at varied factors all through processing may be invaluable for locating sure course of issues that can not be detected visually. A wafer weight change that exceeds allowable ranges can instantly flag a difficulty that wants additional inspection or correction. Complete wafer weight data may also be included in SPC programs to boost the precision and high quality of a fab’s course of monitoring general.
WaferWeight data can all be saved in EAGLEview’s highly effective ProcessGuard™ software program. This method maintains a database of knowledge on each wafer run by way of the device – by lot, date and time. It might probably mechanically randomize wafers and observe incoming and outgoing slot positions of each wafer. ProcessGuard’s built-in Slot-Positional Evaluation Device can plot and examine a spread of wafer data, together with wafer weight. It might probably present wafer weights and pre/publish course of weight deltas for each slot place.