MEMS and NEMS more and more combine a number of features inside compact platforms, enabled by piezoelectric and ferroelectric supplies resembling PZT, BaTiO3, AlN, ScAlN, PVDF, and Hf0.5Zr0.5O2. These supplies help gadgets together with mechanical sensors, RF resonators for gasoline detection, power harvesters, non-volatile recollections resembling FeRAM and FeFETs, and neuromorphic computing arrays, in addition to microspeakers and microphones for compact audio interfaces. Additionally they play a key function in reconfigurable photonic parts by means of acousto-optic and electro-optic modulation. This assessment examines supplies, system designs, and integration methods shaping next-generation clever microsystems throughout domains resembling Synthetic Intelligence of Issues (AIoT), wearables, and robotics.
