Funding in new manufacturing software for the semiconductor tools trade – Jenoptik is investing a low double-digit million-euro quantity in a state-of-the-art system for the high-tech fab at the moment underneath building in Dresden.
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The brand new electron-beam lithography system (E-Beam) can be used to fabricate high-precision micro-optical parts for purchasers within the semiconductor and optical communication sectors. The producer is the Jena based mostly e-beam know-how specialist Vistec Electron Beam GmbH. The system can be delivered at the start of 2025.
Creating the smallest buildings with most precision
One of these electron-beam lithography system can “write” buildings with a precision within the 10-nanometer vary (roughly 1/2,000th of a hair) on substrates as much as 300 mm in diameter.
The Vistec SB3050-2 electron-beam lithography system is predicated on the so-called Variable Formed Beam precept, with which even massive areas might be structured extremely precisely and successfully.
The excessive diploma of automation, mixed with flexibility by way of usable substrates, are additional options of the Vistec SB3050-2 that allow it for use in an industrial atmosphere. The system is supplied with Cell Projection performance, opening up additional potentialities for purposes in micro-optics.
Jenoptik has been lively in Dresden since 2007. With the new high-tech fab at Airportpark Dresden, the corporate is consolidating its manufacturing, which is at the moment unfold throughout a number of small exterior websites, whereas on the similar time increasing its capacities. The clear room manufacturing within the new fab will cowl 2,000 sq. meters with clear room areas of lessons ISO 5 and three and meet the best necessities for freedom from vibrations and temperature stability.
Excessive environmental requirements are taken under consideration for the whole fab: Jenoptik is striving to satisfy the at the moment most complete and stringent constructing standards by way of sustainability with the “KfW 40 Commonplace” and the “LEED Gold Commonplace Certification”. On the similar time, high-quality jobs can be created and the variety of workers on website will enhance to a complete of greater than 120. The Saxon state capital will thus develop into the primary location for the micro-optics sector.
About Jenoptik
Optical applied sciences type the premise of our enterprise. Jenoptik is a worldwide photonics group and includes the 2 divisions Superior Photonic Options and Sensible Mobility Options. Non-photonic actions, significantly for the automotive market, are operated as unbiased manufacturers inside the Non-Photonic Portfolio Firms.
Our key markets primarily embrace semiconductor & electronics, life science & medical know-how in addition to good mobility. Greater than 4,400 folks worldwide work for the Jenoptik Group, which is headquartered in Jena (Germany). JENOPTIK AG is listed on the German Inventory Alternate in Frankfurt and traded on the MDax and TecDax. In fiscal yr 2022, Jenoptik generated income of 980.7 million euros.
About Vistec Electron Beam GmbH
As a long-standing tools provider, Vistec Electron Beam GmbH, Jena (Germany) is offering main know-how options for superior electron-beam lithography. Primarily based on the Variable Formed Beam (VSB) precept, the electron-beam lithography techniques are primarily utilized for industrial and superior analysis purposes, resembling electron-beam direct write in semiconductor manufacturing, together with compound semiconductor direct write, masks writing in addition to photonics and a number of other new rising markets.
Environment friendly knowledge processing & modern publicity methods (e.g. Cell Projection) open up new purposes, particularly within the discipline of AR/VR. Vistec’s know-how options automated dealing with, in addition to excessive flexibility, writing accuracy and productiveness and subsequently is appropriate for prototyping and low quantity manufacturing. Along with its manufacturing facility in Germany, Vistec maintains service & assist facilities in Asia Pacific, USA and Europe.
